Modeling the Deposition of Thin Films of Transition Metal Nitrides /

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Modeling the Deposition of Thin Films of Transition Metal Nitrides

Title statement	Modeling the Deposition of Thin Films of Transition Metal Nitrides / aut. Aleksandr Vasiľjevič Gončarov, Andrii Yunda, Ivan Kolinko, Grygoriy Kornich, Dmytro Shyrokorad
Main entry-name	Honcharov, Oleksandr, 1961- (Author) - MTF Ústav materiálov
Another responsib.	Yunda, Andrii (Author)
	Kolinko, Ivan (Author)
	Kornich, Grygoriy (Author)
	Shyrokorad, Dmytro (Author)
In	Coatings. -- ISSN 2079-6412. -- Vol. 13, iss. 12 (2023), art. no. 2035, s. 1-14
Subj. Headings	nitrides
	thin films
	Monte Carlo
	molecular dynamics
Language	English
Document kind	RBX - článok z periodika
Category	ADC - Scientific titles in foreign carented magazines and noticed year-books
Category (from 2022)	V3 - Vedecký výstup publikačnej činnosti z časopisu
Type of document	článok
Year	2023

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