Modeling the Deposition of Thin Films of Transition Metal Nitrides / aut. Aleksandr Vasiľjevič Gončarov, Andrii Yunda, Ivan Kolinko, Grygoriy Kornich, Dmytro Shyrokorad
Honcharov Oleksandr ; 061000  Yunda Andrii Kolinko Ivan Kornich Grygoriy Shyrokorad Dmytro
Coatings . Vol. 13, iss. 12 (2023), art. no. 2035, s. 1-14
nitrides thin films Monte Carlo molecular dynamics
https://www.mdpi.com/2079-6412/13/12/2035
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