nitrides. thin films. Monte Carlo. molecular dynamicsHoncharov, Oleksandr, 1961- Modeling the Deposition of Thin Films of Transition Metal Nitrides / aut. Aleksandr Vasiľjevič Gončarov, Andrii Yunda, Ivan Kolinko, Grygoriy Kornich, Dmytro Shyrokorad. -- 10.3390/coatings13122035. -- 2-s2.0-85180711713. -- 001131112300001. -- 001131112300001. Yunda, Andrii. Kolinko, Ivan. Kornich, Grygoriy. Shyrokorad, Dmytro In: Coatings. -- ISSN 2079-6412. -- Vol. 13, iss. 12 (2023), art. no. 2035, s. 1-14.