- New chemical pathway for large-area deposition of doped diamond films…
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New chemical pathway for large-area deposition of doped diamond films by linear antenna microwave plasma chemical vapor deposition

  1. New chemical pathway for large-area deposition of doped diamond films by linear antenna microwave plasma chemical vapor deposition / aut. Marián Marton, Marian Vojs, Pavol Michniak, Miroslav Behúl, Vlastimil Řeháček, Michal Pifko, Štěpán Stehliík, Alexander Kromka
    Marton Marián ; 033000  Vojs Marian ; 033000 Michniak Pavol ; 033000 Behúl Miroslav ; 033000 Řeháček Vlastimil ; 033000 Pifko Michal Stehlík Štěpán Kromka Alexander ; 033000
    Diamond and Related Materials : . Vol. 126, (2022), Art. no. 109111 [9] s.
    boron doped diamond large area deposition Trimethyl borate Linear antenna microwave CVD
    https://www.sciencedirect.com/science/article/pii/S092596352200293X
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