Number of the records: 1
reactive magnetron sputtering
SYS 0093317 LBL 00000nz--a22^^^^^n--4500 003 SK-STU 005 20210507154152.8 008 210507|n|acnnnbabn-----------n-ana-----d 040 $a STU $b slo 150 $a reactive magnetron sputtering 980 $x K
Number of the records: 1