Study of self-masking nanostructuring of boron doped diamond films by RF plasma etching / aut. Marián Marton, Mário Ritomský, Pavol Michniak, Miroslav Behúl, Vlastimil Řeháček, Robert Redhammer, Andrej Vincze, Martin Papula, Marian Vojs
Marton Marián ; 033000  Ritomský Mário Michniak Pavol ; 033000 Behúl Miroslav ; 033000 Řeháček Vlastimil ; 033000 Redhammer Robert Vincze Andrej Papula Martin Vojs Marian ; 033000
Vacuum . Vol. 170, (2019), Art. no. 108954 [6] s.
boron doped diamond plasma etching Self-masking nanostructured surface
https://www.sciencedirect.com/science/article/pii/S0042207X18324588
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