New chemical pathway for large-area deposition of doped diamond films by linear antenna microwave plasma chemical vapor deposition /

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New chemical pathway for large-area deposition of doped diamond films by linear antenna microwave plasma chemical vapor deposition

Title statement	New chemical pathway for large-area deposition of doped diamond films by linear antenna microwave plasma chemical vapor deposition / aut. Marián Marton, Marian Vojs, Pavol Michniak, Miroslav Behúl, Vlastimil Řeháček, Michal Pifko, Štěpán Stehliík, Alexander Kromka
Main entry-name	Marton, Marián, 1980- (Author) - FEI Ústav elektroniky a fotoniky
Another responsib.	Vojs, Marian, 1979- Z2 (Author) - FEI Ústav elektroniky a fotoniky
	Michniak, Pavol, 1986- Z2 (Author) - FEI Ústav elektroniky a fotoniky
	Behúl, Miroslav, 1989- Z2 (Author) - FEI Ústav elektroniky a fotoniky
	Řeháček, Vlastimil, 1957- Z2 (Author) - FEI Ústav elektroniky a fotoniky
	Pifko, Michal, 1995- (Author)
	Stehlík, Štěpán (Author)
	Kromka, Alexander, 1971- Z8 (Author) - FEI Ústav elektroniky a fotoniky
In	Diamond and Related Materials. -- ISSN 0925-9635. -- Vol. 126, (2022), Art. no. 109111 [9] s.
Subj. Headings	boron doped diamond
	large area deposition
	Trimethyl borate
	Linear antenna microwave CVD
Language	English
URL	https://www.sciencedirect.com/science/article/pii/S092596352200293X
Document kind	RBX - článok z periodika
Category	ADC - Scientific titles in foreign carented magazines and noticed year-books
Category (from 2022)	V3 - Vedecký výstup publikačnej činnosti z časopisu
Type of document	článok
In databases
Year	2022

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Number of the records: 1