Simple route to micro and nanopartterning - nano imprint lithography /

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Simple route to micro and nanopartterning - nano imprint lithography

Title statement	Simple route to micro and nanopartterning - nano imprint lithography / aut. Jaroslava Škriniarová, Juraj Nevřela, J Baumgartner
Main entry-name	Škriniarová, Jaroslava, 1954- (Author) - FEI Ústav elektroniky a fotoniky
Another responsib.	Nevřela, Juraj, 1989- Z3 (Author) - FEI Ústav elektroniky a fotoniky
	Baumgartner, J. (Author)
In	ADEPT 2018 [234 s.] / International conference on Advances in electronic and photonic technologies (Adept 2018). -- Bratislava : Vydavateľstvo Spektrum STU, 2018. -- ISBN 978-80-554-1450-8. -- S. 45-48
Subj. Headings	Nanoimprint lithography
	mr-UVCur21-photo-curable imprint resist
Language	English
Document kind	RZB - článok zo zborníka
Category	AFD - Reports at home scientific conferences
Category (from 2022)	V2 - Vedecký výstup publikačnej činnosti ako časť editovanej knihy alebo zborníka
Year	2018

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Number of the records: 1