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HWCVD technology of silicon carbide thin films: Properties
CREPC201511 CREPC201601 CREPC201602 CREPC201603 CREPC201606 CREPC201606O Title statement HWCVD technology of silicon carbide thin films: Properties / aut. Jozef Huran, Miroslav Mikolášek, Pavol Boháček, Angela Kleinová, Vlasta Sasinková, Alexander P Kobzev, Mária Sekáčová, J Arbet Main entry-name Huran, Jozef (Author) Another responsib. Mikolášek, Miroslav, 1983- Z2 (Author) - FEI Ústav elektroniky a fotoniky Boháček, Pavol Z5 (Author) Kleinová, Angela Z5 (Author) Sasinková, Vlasta Z5 (Author) Kobzev, Alexander P. Z6 (Author) Sekáčová, Mária Z5 (Author) Arbet, J. Z5 (Author) In ADEPT 2015 [334 s.] / 3rd international conference on advances in electronic and photonic technologies. -- Žilina : University of Žilina, 2015. -- ISBN 978-80-554-1033-3. -- S. 104-107 Subj. Headings SiC HWCVD structural and electrical characterization solar structure Language English Document kind RZB - článok zo zborníka Category AFD - Reports at home scientific conferences Category (from 2022) V2 - Vedecký výstup publikačnej činnosti ako časť editovanej knihy alebo zborníka Year 2015 
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Number of the records: 1